FVO-450 Series High Temperature Vacuum Oven
August 20, 2026
310mm x 310mm Sorter and EFEM
August 20, 2026
200 / 300mm Wafer Sorter and EFEM
Features
• 200mm/300mm wafers transfer
• Class 1 environment with integrated ionizers
• SECS/GEM capabilities
• Reliable performance using SUN field proven load port and robot
Features
- 200mm/300 mm wafers transfer
- Class 1 environment with integrated ionizers
- Compact footprint with field proven chassis design
- Simple graphic user interface with touch screen
- SECS/GEM capabilities
- Reliable performance using SUN field proven load port and robot
- Wafer alignment and notch finding
- Support 200mm cassette adaptor on 300mm load ports
- Wafer ID (OCR) reading
- RFID/Smart Tag/Barcode reading
Sorting Function
| Function | Information |
| Slot Transfer
|
Freely select wafers and their target to transfer. Each selection can independently support alignment and ID reading for throughput improvements |
| Box Transfer(Batch transfer) | Transfer wafers from pod to pod or batch to batch. Alignment and reading wafer ID are configurable options |
| Read | Read all wafers ID and display them on GUI. Wafers are put back to original slot after reading ID |
| Sort by ID | Read all wafers’ ID and sort the wafers according to their ID reads. Sorting can be in the same pod or use another empty pod as the target |
| Find | Read all wafers ID and display wafers’information if they meet user input criteria. Wafers are put back to original slot after reading ID. |
| Match Slot by ID | Read all wafers’ ID and transfer wafers to the specified slot as their ID. Sorting can be in the same pod or use another empty pod as the target. |
| Odd/Even | Read all wafers’ ID in a specified port and transfer wafers to the other specified port according to their ID are even or odd. Source pod can be assigned as a port for Odd or Even. |
| Split | Read all wafers’ ID in a specified port and transfer wafers to the other specified port if their ID meet the user inputted criteria. Wafer will be transferred back if there are no meet criteria. Target port can be multiple. |
| Merge | Read all wafers’ID in one or more port and transfer wafers to a specified port if their ID meet the user inputted criteria. |
Software Features
| Feature | Description |
| Wafer status display | Display each slot wafer status – present, empty or even cross with different color for an easily quick view of wafer status. |
| Recipe edition/operation | All transfer/sorting function can be saved as a recipe for a quick execution. |
| Transfer log trace | Save wafer transfer log to be able to trace in the future. Automatic delete old log to save disk space. |
| Manual control | Step by step to operate each module for system verification. |
| PM suggestion | Log each module operation times to provide a hint for a PM request. |
| Reliability test | Flexible reliability test selection to test each module after installation or main service. |
| Complete operation log | Text format log to assist finding root cause after error happens. Automatic delete old log to save disk space. |
| User management | Provide three user levels – Operator, Engineer and Administrator for a better security system operation. |
| SECS/GEM | SEMI Standard host communication ability. SECS I or HSMS are all available. |
| E84 | SEMI E84 standard for AGV/OHT application. |
Note: Specifications are subject to change without prior notice.
