200 / 300mm Wafer Sorter and EFEM
August 20, 2026
200mm Wafer Sorter
August 20, 2026
310mm x 310mm Sorter and EFEM
Features
• 310mm panels Sorter/EFEM available
• Configurable 1/2/4 Lord Port, offering flexible customization
• SECS (HSMS-SS) Standard
• E84 interface for OHT available
• ID-System: Standard RFID reader (134.2KHz) (Optional IR-Link or Barcode)
• Provisions for CE / S2 / S8 Certifications
• Fully Compliant to SEMI Standard for Factory Automation (GEM300)
• ISO 3 cleanliness configuration available
• All hardware and software are 100% IP ownership
Specifications
| Classification | Sorter Specification | |
| 2 ports | 4 ports | |
| Size (W x D x H) | 2041 x 1393 x 2250 mm | 3050 x 1393 x 2250 mm |
| Glass size | 310mm x 310mm | |
| Cleanliness | Class 1 @ 0.1µm | |
| Through put | 400 WPH (Without OCR and Aligner)
200 WPH (With OCR and Aligner)
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| End-effector | Vacuum blade or edge gripper | |
| Robot repeatability | ± 0.1 mm | |
| Aligner repeatability | ± 50 um | |
| Communication | SECS/GEM or HEX-TCPIP | |
| MTTR | ≤ 2 hours | |
| MTBF | ≥ 8,000 hours | |
| Wafer Breakage Rate | < 10 per 1,000,000 wafers | |
| OS | Windows 11 | |
| Software | SUN independently developed software | |
| Power requirement | 1~+PE 220 VAC, 50/60 Hz, 3.3kW | 1~+PE 220 VAC, 50/60 Hz, 4.4kW |
| Options | Glass Edge Inspection and Robot Mapping Option | |
Note: Specifications are subject to change without prior notice.
