310mm x 310mm Sorter and EFEM
August 20, 2026
300mm Wafer Sorter
August 20, 2026
200mm Wafer Sorter
Features
• Class 1 environment with integrated ionizers
• Compact footprint with field proven chassis design
• Wafer alignment and notch finding
• Support 200mm cassette adaptor on 300mm load ports
• Reliable performance using SUN field proven load port and robot
• Simple graphic user interface with touch screen
• SECS/GEM capabilities
• Wafer ID (OCR) reading
• RFID/Smart Tag/Barcode reading
Specifications
| Classification | Sorter Specification | ||
| 2 ports (1 line) | 4 ports (2 lines) | 4 ports (1 line) | |
| Size (W x D x H) | 1412 x 1096 x 2053 mm | 1412 x 1622 x 2053 mm | 2422 x 1096 x 2053 mm |
| Wafer size | 200mm wafer | ||
| Cleanliness | Class 1 @ 0.1µm | ||
| Through put | 500 WPH (Without OCR and Aligner)
250 WPH (With OCR and Aligner)
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| End-Effector | Vacuum blade or edge gripper or none touch end-effector | ||
| Robot repeatability | ± 0.1 mm | ||
| Aligner repeatability | ± 0.1 mm | ||
| Communication | SECS I/HSMS and SECS II | ||
| MTTR | < 2 hours | ||
| MTBF | >8,000 hours | ||
| Wafer Breakage Rate | < 10 per 1,000,000 wafers | ||
| OS | Window 10 Professional or newer | ||
| Power requirement | 220 V, 60 Hz, 3 wires, 1 phase | ||
| End-Effector Option | 1+1 Blade or 1+5 Blade | ||
Note: Specifications are subject to change without prior notice.
