PLM
August 19, 2026POS-150 G3
August 20, 2026
PLS
Features
• Ultra small footprint saves valuable FAB floor space
• IR or RFID read/write
• LED Statue Indicator
Specification
General Compliant with SEMI specification
| Classification | PLS-200 |
|---|---|
| Dimensions (W x D x H) | 340 x 430 x 119 mm |
| Weight | 6.5Kg |
| Load Capacity | 12Kg |
| Power Requirement | 110/220VAC, 50/60Hz, 20W
Open/Close switch LED Indicator |
| Pod Interface | E19.4-0697 |
| Cycle Time | Open Pod < 6 second
Close Pod < 6 second |
| Lock Accurate | ± 1 degree |
Note: Specifications are subject to change without prior notice.
