LPT+ S
August 19, 2026
LPT+ R
August 19, 2026
LPT+ Sx
Features
• Less than 90-second cycle time maximizes production.
• Small footprint saves valuable FAB floor-space.
• Tilt and Slide end effector meets special customer requirements.
• Adjustable loading height provides ergonomic efficiency.
• Built-in mini-environment and clean airflow system maintain Class 1 cleanliness.
• CE and S2S8 certification
Process
Latches unlock the SMIF pod, Mini-environment rises and lifts the SMIF pod cover while maintaining Class 1 cleanliness inside SMIF pod. Robot arm picks up cassette and places it on to process tool stage. Process is reversed for unloading.
Functional and safety features
- Cassette present and wafer protrusion sensors
- Cassette overload sensor
- Static-dissipative plastic windows
- Fail-safe cassette gripper
- Built-in diagnostics
- PIO safety interlocks and programmable macros
- Power failure recovery system automatically returns cassette to home position
| Classification | LPT+SX-X |
| Size (W x D x H) |
35 x 50 x 184cm (13.7x20x72.4 inches) 90cm standard load height, adjustable |
| Weight | 93kg (206 lbs) |
| Cleanliness | Class 1 Cleanliness
<0.1 PWP @ 0.2 μm or greater size particles |
| Electric Supply | 110v AC standard (220v optional), single-phase,
50/60Hz, 110v@3A / 220v@1.7A |
| Communication Interface | Parallel I/0 (SEMI E23-96) 8 inputs / 8 outputs |
| EIA-RS232(SECS I/II) | |
| Ethernet Communication (TCP/IP, HEX Command) | |
| ID Reader/Writer(Optional) | IR Link/RFID System/IR-RF combo |
| Cycle Time | < 90 second |
| MTBF | 2,000 hours |
Product View
Note:
- Transferring Height depends on cassette size.
- Specifications are subject to change without prior notice.
