LPT+ R
August 19, 2026
PLS
August 19, 2026
PLM
Features
• Class 1 cleanliness with active self-clean airflow design
• Support SEMI compliant 200mm wafer and reticle SMIF pods
• All electrical system with field programmable application software
• Wafer/Reticle protrusion sensor
• Four programmable Interlock signals
• Static dissipative transparent panels
• Substrate protrusion sensors protect reticles/wafers during operation
• Easy installation to all existing tools
Specifications
| Classification | PLM-200 |
| Dimensions (W x D x H) |
431.2 x 421.2 x 770.2 mm
(17″w x 16.6″d x 30.2″h)
|
| Weight | ~23kg(~51lbs) |
| Cycle Time | <90 second |
| MCBF | 50,000 cycles |
| MTTR | Less than 1 hour |
| Power requirement | 3A max, 24VDC
Optional 3A max, single phase 50/60 Hz, 110/220 VAC |
| Communication | Parallel, Serial
Optional SECS/GEM |
| Options | Wafer mapper, RFID, IR Link |
Interface Adapter Module
PLM Tool Standard (BOLTS-M) Interface Mounting Adaptor (Option):
- Mechanical adaptor plate with moving wheels designed to mount to a SEMI E63 300mm BOLTS-M Interface.
- Load height adjustable to meet SEMI Standard E117 Requirements.
The illustration is as follows:
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Note: Specifications are subject to change without prior notice.
